Nanometrics material characterization systems have been built for maximum flexibility and modularity to ensure a wide range metrology solutions in various process application. Nanometrics' Materials Characterization Group has continuously designed systems that specializes in delivering information about critical material parameters which allow users to develop and control processes in many areas. By supplying optical and electrical properties of layers along with defect, thickness, uniformity and bow information, system users can easily control the deposition process and enhance process equipment productivity and yield.