Advanced Process Control Systems and Solutions
  • Onto Innovation
  • Atlas III+ OCD Metrology System
  • IMPULSE Integrated Metrology System
  • OCD Metrology - NanoDiffract
3D Process Control

Smaller, faster, more sophisticated chips. At 22nm and below, novel designs featuring 3D multi-gate transistors are helping to extend the roadmap for smaller devices. But moving to smaller technology nodes with these new structures presents manufacturing challenges.


Nanometrics offers a suite of process control tools to help manufacturers as they shrink designs to sub 30nm nodes and develop robust solutions for vertical IC integration.


Learn more about 3D process control for
front end manufacturing or advanced packaging.