FTIR Metrology


Fourier Transform Infrared


FTIR (Fourier Transform Infrared) is a technology that creates infrared spectra by first collecting an interferogram of a sample signal using an interferometer, and then performing Fourier Transform on the collected interferogram to create a spectrum. An FTIR tool collects the interferogram, digitizes the data, performs the FT function, and displays the spectrum.


With unprecedented accuracy, Nanometrics FTIR products allow users to measure epitaxial thickness and conductivity, recycled wafer thickness, thick film thickness, as wells carbon, oxygen and nitrogen concentrations in silicon. They also can provide compositional analysis of dielectric films, determine dopant species and provide transition zone thickness measurements. From the processing wafer pieces to full 300mm wafers, Nanometrics FTIR products can solve your material characterization needs.