200mm FTIR Metrology


The QS2200 is a FTIR metrology tool specifically designed for non-destructive wafer analysis. It is used for the characterization and measurement of semiconductor materials as well as device manufacturing.


The QS2200 model is available in two configurations:



Automated system with two open cassette stations



Automated system with an indexer and open cassette system


The QS2200 series incorporates a universal stage, which adjusts automatically to different wafer sizes 100, 125, 150 and 200mm. FILMZ Unique algorithms deliver instant qualification of SOI, SiC, and other epitaxial films. Built-in intelligence extends the applicability to almost every film material imaginable.


Additionally, it is versatile enough to qualify thickness of recycled test wafers for rapid payback.