Atlas
System Preventative Maintenance Course

Training Course Objectives and Outline:
This course is intended to provide the equipment technician or equipment engineer with the knowledge and skills necessary to perform a complete PM exercise

Upon successful completion of the course curriculum the student should have mastered the following course objectives.

• Identify safety hazards
• Demonstrate proper defeat of safety interlocks
• Demonstrate starting N2000
• Demonstrate Loading / Unloading wafers
• Demonstrate creating stage and wafer recipes
• Demonstrate creating recipes with Descew and Site PR
• Demonstrate Transferring data to floppy
• Describe function of power distribution components
• Describe function of computer components
• Describe function of miscellaneous electronics components
• Demonstrate setting environmental controls
• Demonstrate use of DP Win to find stage center indexes
• Demonstrate face seal replacement and relubrication
• Demonstrate wafer handling station teaching
• Demonstrate Halogen bulb replacement
• Demonstrate XE bulb replacement
• Demonstrate Xenon bulb replacement
• Demonstrate SE XE bulb replacement

Course Length: 4 days
Prerequisite Courses: None