Atlas
System Corrective Maintenance Course

Training Course Objectives and Outline:
This course is intended to provide the equipment technician or equipment engineer with the knowledge and skills necessary to perform a first level corrective maintenance

Upon successful completion of the course curriculum the student should have mastered the following course objectives.

• Demonstrate usage of DP Win for stage diagnostics
• Demonstrate replacement of the Agile controller
• Demonstrate leveling and alignment of the wafer handling robot and load ports
• Demonstrate replacement of the wafer handling robot controller
• Demonstrate replacement of the pre-aligner
• Demonstrate focus setup
• Demonstrate stage alignments
• Demonstrate computer component diagnostics and replacement
• Demonstrate Stage Encoder readhead replacement
• Demonstrate reference replacement

Course Length: 5 days
Prerequisite Courses: Atlas Preventative Maintenance Course