Photoluminescence Mapping

Our PL Mapping technology and systems produces high resolution maps of epitaxial wafers that make variations in layer composition, quality or thickness visible, providing the crystal grower with reliable feedback needed to optimize the growth processes. It also gives the manager valuable information on a wafer's projected device yield. Screening wafers at an early stage helps your organization guarantee a supply of high quality, high uniformity epilayers required for high productivity and efficient processing.

How does it work?

The system scans the wafer surface, collecting PL spectra at each point and mapping variations in the intensity, wavelength and width of the PL signal. Stability and reproducibility are built in to ensure accurate statistical control without the need for re-alignment and re-calibration.