Fourier Transform Infrared (FTIR)

FTIR products range from a highly customizable desktop unit, QS1200, to a fully automated, robust, Edge Grip system, QS3300 EG, for reliable production control. Whether you process wafer pieces or 300mm wafers, Nanometrics can deliver a solution to your material characterization needs. With its focus on developing application solutions solely for the semiconductor industry, Nanometric FTIR’s have the distinction of leading the market for decades. The suite of applications include: Epitaxial thickness and conductivity, recycled wafer thickness, thick film thickness, Carbon, Oxygen and Nitrogen concentrations in Silicon and Compositional analysis of dielectric films. We continue to advance the capability of FTIR measurements with our application packages, Filmz, and Quantum II which provide unprecedented film thickness accuracy and the ability to determine dopant species and transition zone thickness measurement.