Integrated Metrology

Film Analysis

FTIR

Inspection

Mask Metrology

Overlay Metrology

Scatterometry

Contamination & Defect Process Control
> SiPHER

Compound Semiconductor
> Carrier Concentration &    Mobility
> PL Mapping
> X-Ray Diffraction

SOLUTIONS: CARRIER CONCENTRATION & MOBILITY

Electrochemical Capacitance Voltage Profiling

Automation only has value if the measurements are accurate – and ECV Pro excels in this aspect. ECV Pro’s newly designed digital electronics eliminate drift and significantly improves signal to noise. Electrochemical capacitance voltage profiling is accurately determined and is calibrated to built-in standards prior to every measurement. ECV Pro introduces a novel dual-frequency measurement so that a complete solution is found to the three-term model. ECV Pro can measure carrier concentrations from 1013cm-3 to 1020cm-3 over a depth range from 0.05µm to 50µm with an unparalleled depth resolution of 1nm. The ECV profiler will exceed your expectations in every respect.

ECV

Hall Mobility

  • Van der Pauw, Hall Bar and Bridge measurements to ASTM F-76 Rapid QA measurements using micromanipulators and a two temperature cryostage for wafers up to 3" diameter
  • Rare earth permanent magnet giving excellent field stability and low noise
  • Simple probe system for convenient and fast sample throughput
  • Compact benchtop design
  • Wide range of modules available· High resistivity 1012 Ω/ڤ buffer amplifier
  • Liquid Nitrogen Cryostat
  • Liquid Helium Cryostat
  • Hot Stage
  • Comprehensive data acquisition and evaluation Windows software
HALL EFFECT
Related Products

> ECV Pro
> HL 55xx

More Info

Please contact us via our product inquiry form