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Contamination & Defect Process Control Compound Semiconductor |
SOLUTIONS: CARRIER CONCENTRATION & MOBILITY Electrochemical Capacitance Voltage Profiling Automation only has value if the measurements are accurate – and ECV Pro excels in this aspect. ECV Pro’s newly designed digital electronics eliminate drift and significantly improves signal to noise. Electrochemical capacitance voltage profiling is accurately determined and is calibrated to built-in standards prior to every measurement. ECV Pro introduces a novel dual-frequency measurement so that a complete solution is found to the three-term model. ECV Pro can measure carrier concentrations from 1013cm-3 to 1020cm-3 over a depth range from 0.05µm to 50µm with an unparalleled depth resolution of 1nm. The ECV profiler will exceed your expectations in every respect. Hall Mobility
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