Integrated Metrology

Film Analysis

FTIR

Inspection

Mask Metrology

Overlay Metrology

Scatterometry

Compound Semiconductor
> Carrier Concentration &    Mobility
> PL Mapping

Nanometrics' process control solutions address the critical metrology information necessary for comprehensive, successful advanced process control strategies. Our diverse product offerings provide a vast breadth of metrology capabilities used across major semiconductor manufacturing process areas, including CMP, CVD and Lithography/Etch.