Z3D 7000

The Z3D-7000 Series Metrology System is a non-contacting, non-destructive, optical metrology tool that measures critical 3-Dimensional features on production wafers for process control. The system accommodates 200 and 300 mm wafer sizes, or can be configured as a bridge tool to simultaneously handle both wafer sizes.

The Z3D-7000 combines state-of-the-art robotics with ZYGO's fifth generation interferometric technology to enable world-class throughput, exceeding the throughput of contact technologies by as much as a factor of 10.

Key Features:

• Automated, high-speed non-contact metrology for FEOL
• Accommodates 200 and 300 mm wafers
• Simultaneously measures multiple  parameters
• ISO Class 2, S2/S8, and CE Certified
• SEMI E95 compliant software
• Modular IntelliSensors reduce MTBR