VerteX
PL Mapping with Power Density Control

The latest addition to the industry-standard RPM
family, VerteX takes a great concept and drives
it to its ultimate conclusion. The VerteX system
is designed to deliver industry-leading accuracy,
repeatability and too-to-tool matching. It brings the
PL measurement process under control so that your
epitaxial process stays firmly under control.

VerteX is designed to provide accurate, precise and repeatable PL metrology across the entire wavelength range. This includes high-Al content AlGaN alloys for GaN FET’s and UV lasers to the Antimonides out in the MIR and everything
in between. VerteX offers a catalogue of more than 15 standard lasers and the ability to fiber-feed a virtually unlimited array of sources. The monochromator can be fitted with up to three gratings and two array detectors — and, once
configured, every optical component is selected under computer control. To ensure the highest possible wavelength accuracy, VerteX contains its own built-in spectral source for monochromator calibration.

VerteX can accommodate up to 4 internally mounted lasers. Two of those laser feature a continuously-variable power control with feedback loop. Wherever possible, we have standardized on direct delivery of the laser beam. However, large lasers can be fiber connected.

For film thickness measurements, the system can be fitted with a white light source. The VerteX software now includes a Fourier Transform facility for data interpretation.