Nanometrics
Vertex PL Mapping

Vertex

PL Mapping System with Power Density Control

 

The latest addition to the industry-standard RPM family, Vertex takes a great concept and drives it to its ultimate conclusion. The Vertex system is designed to deliver industry-leading accuracy, repeatability and tool-to-tool matching. It brings the PL measurement process under control so that your epitaxial process stays firmly under control.

 

Vertex is designed to provide accurate, precise and repeatable PL metrology across the entire wavelength range. This includes high-Al content AlGaN alloys for GaN FET’s and UV lasers to the Antimonides out in the MIR and everything in between. Vertex offers a catalogue of more than 15 standard lasers and the ability to fiber-feed a virtually unlimited array of sources. The monochromator can be fitted with up to three gratings and two array detectors — and, once configured, every optical component is selected under computer control. To ensure the highest possible wavelength accuracy, Vertex contains its own built-in spectral source for monochromator calibration.

 

Vertex can accommodate up to 4 internally mounted lasers. Two of those laser feature a continuously-variable power control with feedback loop. Wherever possible, we have standardized on direct delivery of the laser beam. However, large lasers can be fiber connected. For film thickness measurements, the system can be fitted with a white light source. The Vertex software now includes a Fourier Transform facility for data interpretation.