Vektor
X-Ray Diffraction Metrology

Vektor DCD

Vektor-DCD uses classic double crystal x-ray optics for the best possible combination of resolution and intensity when measuring epitaxial structures with low dislocation densities such as GaAs pHEMTs, InP optoelectronics and SiGe HBT’s.

With substrate peak intensities that are typically greater than 5 million cps and peak FWHM’s less than 10 arc seconds, Vektor-DCD consistently provides better data quality than many multi-crystal diffractometers. In common with all members of the Vektor family, the Vektor-DCD is equipped with a 200mm X-Y mapping stage and can optionally be supplied with an industry-standard Genmark robot and pre-aligner for fully automated operation. Wafers from 50mm to 200mm can be handled and mapped. A range of monochromator crystals are available, from InP (004) through GaAs(004) to Si(004).