SiPHER
Imaging Electrically Active Defects in Silicon

SiPHER detects the presence of defects that lead to reduced minority carrier lifetime. That includes all of the common metal contaminants as well as extended structural defects such as stacking faults and misfit and threading dislocations. These are device killers.

With it's unique combination of high-sensitivity and high spatial resolution, SiPHER has proven itself, time-after-time, to be one of the most powerful and most versatile tools for process optimization and troubleshooting in the fab.