Nanometrics
RPMBlue

RPMBlue-FS

PL Mapping Tool

 

The RPMBlue-FS is a photoluminescence mapping tool that can be fitted with a robotic wafer handler if needed. This tool has a very flexible configuration with a full specification spectrometer that can cover wavelengths from the deep UV to 2 microns or more. With room to fit up to four laser excitation sources and two array detectors while handling wafer sizes from 2" to 6", this high-speed room temperature PL mapper can meet the needs of almost all compound semiconductor users.

 

The powerful applications software with offline data analysis has sophisticated recipe creation and data porting capabilities that make this tool invaluable from research labs to high volume production.