PLMicro
PL Micro Mapping

The PLMicro is a versatile screening tool, producing high resolution maps of epitaxial wafers that make variations in layer composition, quality or thickness visible. It provides the crystal grower with reliable feedback needed to optimize the growth processes. It also gives the manager valuable information on a wafer's projected device yield. Screening wafers at an early stage helps your organization guarantee a supply of high quality, high uniformity epilayers required for high productivity and efficient processing.

The PLMicro scans the wafer surface, collecting PL spectra at each point and mapping variations in the intensity, wavelength and width of the PL signal. Stability and reproducibility are built into the PLMicro to ensure accurate statistical control without the need for re-alignment and re-calibration.

The modular construction of the PLMicro allows it to be configured with the optimum component for a given material (see table below). A variety of laser modules is available, covering a wavelength range from ultra-violet through visible to mid-infra red. All of the lasers were carefully selected for their stability in both wavelength and intensity. All components are pre-aligned and user interchangeable with no realignment required. Gratings and detectors can also be exchanged in minutes.