Lynx

Advanced 300mm Metrology Platform

The Lynx is the industry’s first compact 300mm cluster metrology platform to enable thin film, optical critical dimension (OCD) and overlay measurements in a single system. The Lynx’s versatility provides for a range of custom configurations, from a streamlined single metrology platform to an expanded, high-productivity, multi-metrology platform.

The Lynx system can run up to 360 wph across configurations of up to four metrology modules, including IMPULSE CD, IMPULSE Thin Film, and Mosaic overlay solutions. Modules can be easily installed or upgraded to extend system capabilities.