Nanometrics iKhan
Universal Defect Inspection System

The Nanometrics iKhan system is a 300mm, universal defect inspection system that features a unique edge-gripping wafer handling system that enables inspection of both the front and backside of the wafer without wafer surface contact. An advanced combination of high intensity illumination for inspection, high-resolution optics for macro-defect detection and sophisticated image processing ensures the detection of "killer" defects. The advanced image processing technology coupled with the unique wafer handling system provides full wafer inspection throughput in excess of 180 wafers per hour. The NanoUDI 9300 metrology system can be used in nearly every step of the wafer production process including rough polishing, CMP, layering, photolithography, doping, and die sort and pre-packaging. The system's common measurement modules ensure complete recipe interchangeability and tool-to-tool matching with NanoNet, a Nanometrics metrology networking software product.