Nanometrics
ECV-Pro

ECVPro™

Advanced Electrochemical Capacitance Voltage (ECV) Profiler

 

The patent-pending ECVPro is the result of a total redesign that completely redefines ECV profiling. We have taken 25 years of ECV profiling experience and coupled it with 25 years of advances in instrument control technology to produce the most precise, most reproducible, most highly-automated electrochemical CV profiler ever. The ECVPro was designed, from the ground up, to eliminate all operator dependent variations in the data. All the operator has to do is set the wafer on the stage. After initial setup, the ECVPro takes care of everything else.

 

ECVPro introduces the first ever in-situ camera for unprecedented levels of control, ECVision™. allowing real-time imaging of the semiconductor/ electrolyte interface. Now you can see exactly what occurs at the sample surface during a measurement.

 

For III-Nitrides, the ECVPro GaN option extends the performance of the system for optimal profiling of GaN, InGaN and AlGaN.