ECV Pro Etch Profile

Nanometrics' electochemical CV profiler user interface is built around Industry Standard SEMI E-95 guidelines. The ECV software is extremely intuitive and guides the user, step by step, through the measurement and analysis. User-defined recipes allow automated profiling of complex structures and eliminate the need for operator supervision during measurement. Recipe control of processes markedly improves reproducibility.

In production operation ECV Pro can be programmed to signal out-of-control situations should the carrier concentration exceed process tolerance limits.

For structures requiring multiple electrolytes, the ECV Pro is programmable to allow efficient and automated changing of the electrolyte.