ECV Pro - An Alternative

ECV Pro: Hg Probe Alternative.
ECV Pro’s accuracy and reproducibility provide a viable, safe and environmentally friendly alternative to the Mercury probe. The ECV profiler uses no Calomel reference electrode and is entirely Mercury free. The horizontal stage makes monitoring spatial distribution across a wafer simple and convenient. Using the depletion profile mode and the ultra-repeatable contacting area, ECV Pro can accurately measure the surface doping variations across a wafer.

ECV Pro: An Alternative to Hall.
ECV Pro offers many advantages over Hall measurements. These include measurement of electrically activated dopants and individual structural layer information. Additionally, ECV Pro can be applied to a wide range of materials and structures and is not limited to profiling only on SI or suitable PN structures.