ECVision™

Once you have used a profiler with ECVision™ you will never want to go back to "flying blind." Nanometrics' electrochemical capacitance voltage profiler uniquely features a camera that images the semiconductor/electrolyte interface. You can now be certain to eliminate data corruption due to bubbles or other disturbances, ECVision delivers novel insight of film removal or defect revelation during the etch process. ECVision can also make a permanent visual record of the semiconductor/ electrolyte interface at any pre-programmed depth. This invaluable information accelerates etch process development or troubleshooting.

By automatically measuring the etch area, in situ, immediately after the profile, ECVision greatly improves data accuracy. Integrated SPC software tracks the change in etch area over time. Separate charts are provided for p-type and n-type and for different electrolytes. This useful facility improves measurement control and extends the lifetime of a sealing ring without compromising data quality.