CDS200
200mm CD Control System

CDS200 is a fast, non-destructive critical dimension metrology tool which offers improved process control, and high throughput for use in R&D, production and quality control environments. It is fully automated and can accurately measure critical dimensions as small as 70nm while simultaneously determining cross-sectional profile and layer thickness.

PCM3
Advanced CD Profile Control Module

PCM3 is the latest generation parallel computing module which offers our latest Linux based Xeon CPU architecture, it provides up to 10X signature generation throughput improvement over previous configurations, advancing precision and reliability of the scatterometry measurements while enabling complex dual periodic (3-D) applications.

The PCM3 provides CDS200 product extendibility and a platform that enables next generation technology implementation. By reducing application development time and improving metrology capability, PCM3 advances your process yield improvement and time-to-market.