Caliper élan
Powerful, Cost Effective and Fast Overlay Measurement

Caliper élan builds on the strengths of its predecessors as a tool able to perform across an entire process, not just the easy levels. With a combination of newly-introduced technology together with substantial improvements in optics and software, Caliper élan has proven itself in all the key areas to provide control at the levels needed for the most advanced levels of production. Like previous generations of systems, Caliper élan provides consistent, effective capability on difficult low contrast and grainy levels, freeing process engineers from the time-wasting re-optimization common among other overlay registration systems. What’s more, Caliper élan is uniquely able to perform at its best without the use of options that result in lower throughput.

And raw speed can bring other benefits. When necessary, Caliper élan can spend a higher proportion of the MAM time on the measurement itself, allowing more robust sampling plans for the more difficult layers while still hitting throughput targets.