Caliper élan
Guaranteed Overlay Metrology Process Transfer. Tool to Tool. Fab to Fab.

Caliper élan's guaranteed tool matching and program portability, without the need to calibrate or optimize, reduces the time taken transferring programs to zero, maximizing equipment availability without compromising precision, accuracy or throughput. Simply share and transfer programs worldwide instantly via LAN or fab network. It's your choice. With no calibration time, no engineer time to rewrite programs, you gain productive time per tool, faster ROI. And now, Caliper élan supports completely automated recipe generation using data supplied by a factory automation host or other external computer system so reliable, trustworthy recipes can be generated in seconds.