Caliper élan
300mm Overlay Inspection Features and Benefits

• Designed for purpose optics and ClearVision image processing for class-leading overlay control
• New ClearFocus system for fast, accurate focusing on all levels
• New, smart software improves overlay registration on the toughest levels
• Class leading throughput, including dual swap robot option and flexible loadport configurations (up to 4 loadports supported)
• Guaranteed recipe portability and matching
• Out of the box factory automation: complies with all essential 300mm automation specifications
• User friendly user interface - Reduces training and recipe generation time
• Automatic recipe generation and offline editing - Increases availability
• Robust Linux OS proven to increase reliability
• Worldwide support organization backed up by unrivaled experience in delivering robust overlay control solutions