QS-FRS
Full Rod Oxygen Analyzer

QSFRS is an automatic ingot scanning FTIR spectrometer system used to determine impurities in bulk silicon in the crystal growing areas. The determination of the interstitial oxygen impurities in bulk silicon ingots includes the provision to calibrate, correct and monitor the daily analysis using SPC control standards. QSFRS has an optional built-in stage for smaller pieces as well as a mobile cart (that allows the longer and heavier whole rod ingots to be carried) as a cart stage for sampling whole rods. QSFRS also has built-in safety interlocks and signal lights to meet the production environment safety requirements.