|
Integrated Metrology Standalone Metrology Tabletop Metrology |
Q240AT Q240AT For our many existing users of Q200 overlay metrology tools (open cassette or SMIF), an upgrade path is available to the advanced capability of the Q240AT – at a fraction of the price of a new tool, and with productivity improvements as well. A number of upgrade options are available, which can be tailored to your technology requirements. And for the future, new features developed for our world-beating Caliper élan 300mm overlay tools will also be made available on the Q240AT. Forward Compatibility is your guarantee of the highest return on your invested capital.
|
|