Integrated Metrology
> 9000i
> 9010T
> 9010B
> 9010M
> IMPULSE
> Trajectory T3

Standalone Metrology
> Atlas XP
> Atlas-M
> Caliper élan
> CDS200
> ECV Pro
> FLX
> HL5500 Series
> iKhan
> IVS 185
> NanoCD Suite
> NanoSpec 9100
> NanoSpec 9200
> Q240AT
> QS1200
> QS2200
> QS3300
> QS-FRS
> RPM2000
> SiPHER
> Stratus
> Vektor
> Vertex

Tabletop Metrology
> NanoSpec 3000
> NanoSpec 6100

DiVA

Q240AT

Q240AT
Upgrade Options For Overlay Inspection Systems

We have a philosophy of Forward Compatibility – which means that every system we design allows for future upgrades. For our customers this means that when you buy systems from Nanometrics you are buying not only for your current requirements, but are assured of our commitment to extend their capability into the future.

For our many existing users of Q200 overlay metrology tools (open cassette or SMIF), an upgrade path is available to the advanced capability of the Q240AT – at a fraction of the price of a new tool, and with productivity improvements as well. A number of upgrade options are available, which can be tailored to your technology requirements.

And for the future, new features developed for our world-beating Caliper élan 300mm overlay tools will also be made available on the Q240AT.

Forward Compatibility is your guarantee of the highest return on your invested capital.


Related Product Info

> Q240AT Features
> Tool Matching & Benefits
> Upgrade Options

More Info

Please contact us via our product inquiry form