Q240AT
Guaranteed Overlay Metrology Process Transfer. Tool to Tool. Fab to Fab.
Q240AT provides guaranteed tool matching and program portability. No need to calibrate or optimize, reducing the time taken transferring recipes to zero, maximizing equipment availability without compromising precision, accuracy or throughput. Simply share and transfer programs worldwide instantly via LAN or fab network. It's your choice. With no calibration time, no engineer time to rewrite programs, you gain productive time per tool, faster ROI.
And now, Q240AT supports SynRG – fully automated recipe generation using data supplied by a factory automation host or other external computer system. Reliable, trustworthy recipes generated in seconds.
