Q2x0AT Series
Overlay Measurement Features & Benefits
- Robust Linux operating system for high reliability and virus resistance
- Designed for purpose optics and ClearVision image processing for class-leading overlay metrology
- New ClearFocus system for fast, accurate focusing on all levels
- New, smart software improves metrology on the toughest levels
- Class leading throughput
- Guaranteed recipe portability and matching
- Standards compliant factory automation as standard
- User friendly user interface - Reduces training and recipe generation time
- Automatic recipe generation and offline editing options
- Built-in analysis software
- Worldwide support organization backed up by unrivaled experience in semiconductor overlay metrology
