Q240AT

Q2x0AT Series
200mm Overlay Metrology Control

Incorporating technology developed for the Caliper élan 300mm overlay metrology tool on a cost effective platform, the Q2x0AT series provides leading edge performance for overlay metrology for wafer sizes up to 200mm.

As more and more Caliper élan customers are finding, the technology now incorporated in the Q2x0AT provides the ability to perform across an entire process, not just the easy levels. With a combination of advanced features and superior optics and software, Q2x0AT has proved itself in all the key areas to provide control at the levels needed for the most advanced levels of production. The entire range provides consistent, effective capability on difficult low contrast and grainy levels, freeing process engineers from time-wasting re-optimization common among other overlay measurement systems.

As well as supporting regular integrated circuit overlay applications, tools in the Q2x0AT series can also be configured for use in thin film head manufacture, even in the most advanced perpendicular recording applications.. With the capability to measure overlay with large layer separations, and critical dimension measurement capability as standard, the Q2x0AT brings new levels of capability and value to this industry segment.

The Q2x0AT series is supplied as standard with a comprehensive, proven GEM SECS automation suite. Configurations are available for a range of wafer sizes up to 200mm, in open cassette or SMIF formats.

For the very highest levels of productivity, systems in the Q2x0AT range can be supported by the SynRG (Synthetic Recipe Generator) option. A new waferless recipe creation application. SynRG takes known design details about device layout, and processes them to create a metrology recipe automatically optimized for the product and process. Using advanced image simulation methods, SynRG is able to simulate the effects of process variation, producing robust, production-ready recipes. SynRG can be fully integrated into the data network to provide completely hands-free recipe creation, supporting the most advanced Design-Based Metrology (DBM) implementations.