NanoSpec 9100
Advanced 200mm Film Analysis System

The NanoSpec 9100 thin film measurement system combines DUV-NIR spectroscopic ellipsometry and DUV-visible spectroscopic reflectometry into one platform for the highest level of equipment utilization and the most comprehensive analysis possible of film thickness and material optical constants. The system is capable of handling 75mm to 200mm wafers. The 9100 is equipped with N2000 , the first metrology software that meets the SEMI user interface standard E95-0200. The system can also be configured to handle the substrates that are used in the magnetic recording head industry. Based on Windows XP, the software also allows for seamless recipe transferal from these standalone systems to Nanometrics' integrated metrology platforms. The NanoSpec 9100 is the only high-end, standalone film metrology system with an automation platform designed for optical-telecom and wireless device manufacturing that is equipped to handle advanced materials and processes with speed and precision.