9000i and 9000iUV
300mm Integrated Metrology Film Analysis Systems

The 9000i and 9000iUV integrated 300mm film analysis systems are ultra-compact measurement platforms for integration into semiconductor wafer processing equipment. The systems are ideal for CVD process control applications. The 9000iUV systems provide UV through visible spectral information necessary for films and film stacks with complex optical properties. The visible-only 9000i system is well-suited for thick transparent film applications. With a non-contact reflectometry measurement technique, the systems deliver extremely fast, reliable and accurate measurement results.