NanoSpec 3000
Tabletop Film Analysis System

The NanoSpec 3000 is a low cost, film thickness measurement system that utilizes a modern small spot spectroscopic reflectometer that is built on a simple-to-use tabletop platform. The rugged, solid state linear diode array provides fast, precise measurements of single-layer films such as oxide, nitride and photoresist, as well as the top layer on film stacks of up to 3 layers in the thickness range of 250Å to 35µm. The flexible software platform makes it simple and easy for the user to configure measurement programs and recipes for both simple and advanced measurement applications. With the ability to select film constants, scan ranges and substrate types, the 3000 is the ideal tool for rapid measurement program development.

Data management features include a database, statistical analysis, histograms and the ability to export data files. Both tabular and Cauchy dispersion models are available for use and material files may be imported and exported.