Milpitas, California. July 22, 2009.

Nanometrics Announces Newest Metrology System for Solar PV Applications

Trajectory Solar Monitor (TSM) Enables Integrated Film Thickness Control on Textured and Rough Films

Nanometrics Incorporated (Nasdaq: NANO), a leading supplier of advanced process control metrology systems used primarily in the manufacturing of semiconductors, solar photovoltaics and high-brightness LEDs, today announced the launch of its TSMTM integrated metrology system. The latest in Nanometrics’ Trajectory product line, the TSM is designed to rapidly measure the thickness of various thin films in order to enable fast feedback and excursion prevention in the manufacture of all types of solar photovoltaic (PV) cells, and further expands Nanometrics’ metrology system footprint into the segment of rough and textured PV film layers.

“Every solar PV cell manufacturing line has unique process control challenges due to the engineered films that are deposited,” commented Tom Ryan, Director of the Materials Characterization Business Unit at Nanometrics. “The launch of the TSM system expands our addressable market into the textured and rough films segment of the solar PV industry. The TSM is optimized for film measurement on high throughput processes, enabling control on textured crystalline silicon cells, complex multi-junction thin film silicon cells and high-roughness CIGS (copper indium gallium (di)selenide) and cadmium telluride (CdTe) films.”

Leveraging Nanometrics’ leadership position and experience in integrated process control solutions, the TSM enables direct integration in solar cell manufacturing lines to enable process control of critical layers. Nanometrics has optimized the Trajectory product to provide robust and precise metrology on today’s most complex thin film solar materials and can be incorporated to measure in atmospheric and vacuum systems. The rapid measurement time of the Trajectory systems can keep pace with any type of cell manufacturing line, enabling measurement of 100% of the products at numerous points throughout the flow, including junction, buffer, and absorber layers, antireflective coatings, and transparent conducting oxides (TCO).

About Nanometrics
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used primarily in the manufacturing of semiconductors, solar photovoltaics and high-brightness LEDs, as well as by customers in the silicon wafer and data storage industries. Nanometrics standalone and integrated metrology systems measure various thin film properties, critical dimensions, overlay control, topography, and optical, electrical and material properties, including the structural composition of silicon, compound semiconductor and photovoltaic devices, during various steps of the manufacturing process, from front end of line substrate manufacturing through die preparation for advanced packaging. These systems enable device manufacturers to improve yields, increase productivity and lower their manufacturing costs. The company maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on NASDAQ Global Market under the symbol NANO. Nanometrics’ website is http://www.nanometrics.com.

Forward Looking Statements
This press release contains forward-looking statements including, but not limited to, statements regarding the capabilities of Trajectory Solar Monitor metrology systems, including measurement time and the applicable range of thin films. Although Nanometrics believes that the expectations reflected in the forward-looking statements are reasonable, actual results could differ materially from the expectations due to a variety of factors. For additional information and considerations regarding the risks faced by Nanometrics, see its annual report on Form 10-K for the year ended December 27, 2008 as filed with the Securities and Exchange Commission, as well as other periodic reports filed with the SEC from time to time. Nanometrics disclaims any obligation to update information contained in any forward-looking statement.

Contact
Nanometrics Contact:
Kevin Heidrich
408-545-6000 tel; 408-317-1346 fax
kheidrich@nanometrics.com

Investor Relations:
Claire McAdams
Headgate Partners LLC
530-265-9899 tel; 530-265-9699 fax
claire@headgatepartners.com