Milpitas, California. October 26, 2006.

Nanometrics and ASML Enter Into Cross-Licensing Agreement for Advanced Overlay and CD Control Metrology Technology

Nanometrics Incorporated (Nasdaq: NANO), a leading supplier of advanced integrated and standalone metrology equipment to the semiconductor industry, today announced it has entered into a cross-licensing agreement with ASML (Nasdaq: ASML), the world’s leading provider of lithography systems for the semiconductor industry.

“We are committed to offering our customers extendible, open-architecture Overlay and CD control solutions that scale beyond 32nm,” commented John Heaton, President and CEO of Nanometrics. “We are extremely pleased to be working with ASML to create solutions that improve lithography performance and economics.”

“Metrology within the scanner is a key element for the current performance of ASML lithography systems.  With increased access to advanced metrology technology we see further opportunities for advancements in lithography and wafer patterning,” stated Karel van der Mast, Senior Vice President of ASML.

About Nanometrics
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used in semiconductor manufacturing.  Nanometrics metrology systems measure various thin film properties, critical dimensions, overlay control and optical, electrical and material properties, including the structural composition of silicon and compound semiconductor devices, during various steps of the manufacturing process. These systems enable semiconductor manufacturers to improve yields, increase productivity and lower their manufacturing costs. The Company maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on NASDAQ Global Market under the symbol NANO. Nanometrics’ website is http://www.nanometrics.com.

About ASML
ASML is the world’s leading provider of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or chips. Headquartered in Veldhoven, the Netherlands, ASML is traded on Euronext Amsterdam and NASDAQ under the symbol ASML. For more information, visit the Web site at ASML.com.

Contact:
Peter Gise
Nanometrics
408.435.9600