Milpitas, California. August 28, 2006.

Nanometrics Sets New Date for 2006 Annual Meeting

Nanometrics Incorporated (Nasdaq: NANO), a leading supplier of advanced integrated and standalone metrology equipment to the semiconductor industry, today announced that it has set a new date for its 2006 Annual Meeting in order to provide its shareholders more time to consider the company’s proposed reincorporation in the state of Delaware.

The Annual Meeting, originally scheduled for September 1, 2006, will be held on September 28, 2006.

About Nanometrics
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used in semiconductor manufacturing. Nanometrics metrology systems measure various thin film properties, critical circuit dimensions and layer-to-layer circuit alignment (overlay) during various steps of the manufacturing process, enabling semiconductor and integrated circuit manufacturers to improve yields, increase productivity and lower their manufacturing costs. Nanometrics maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on the Nasdaq Global Market under the symbol NANO. Nanometrics’ website is: http://www.nanometrics.com.

Contact:
Doug McCutcheon
Nanometrics
408.435.9600