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Milpitas, California. October 5, 2005.

Nanometrics Reports Preliminary Third Quarter Results

Nanometrics, Inc., (Nasdaq: NANO), a leading supplier of advanced integrated and standalone metrology equipment for the semiconductor industry, today announced that its consolidated revenues for the fiscal third quarter ended October 1, 2005 would be below the range of guidance provided in the Company’s July 28, 2005 conference call. The guidance at that time was for third quarter revenues to be ten to twenty percent below second quarter revenues, or $15.0 to $16.9 million. The Company now expects revenues for the third quarter to be approximately $14.0 million.

“While we are disappointed not to achieve our stated revenue goals for the third quarter, we are encouraged when we analyze the causes of the shortfall and the prospects for the upcoming fourth quarter,” said executive vice president, finance and administration and chief financial officer, Douglas McCutcheon. “While we did see some shipments push out to the fourth quarter, the substantial portion of the shortfall related to units that had shipped and were undergoing installation during the third quarter, but which had not yet obtained final acceptance – a necessary requirement for revenue recognition. We expect much of this revenue will be recognized in the Company’s fourth quarter ending December 31, 2005,” McCutcheon continued.

The Company expects to return to sequentially higher revenues in the fiscal fourth quarter; however, no more specific guidance for the fourth quarter will be provided until the final financial results for the third quarter are announced on October 27, 2005.

About Nanometrics
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used in the manufacture of semiconductors, integrated circuits and flat panel displays. Nanometrics metrology systems measure various thin film properties, critical circuit dimensions and layer-to-layer circuit alignment (overlay) during various steps of the manufacturing process, enabling semiconductor and IC manufacturers to improve yields, increase productivity and lower manufacturing costs. The Company maintains its headquarters in Milpitas, CA, with sales and service offices worldwide. Nanometrics is traded on NASDAQ under the symbol NANO. The Company’s website is http://www.nanometrics.com.

Contact:
Doug McCutcheon
Nanometrics
408.435.9600

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