Milpitas, California. March 15, 2004.

Nanometrics Appoints Vice President of Sales for Integrated Metrology

Nanometrics Inc, a leading supplier of standalone and integrated advanced metrology systems, has promoted Jason Rollo to the position of vice president of sales for integrated metrology. Mr. Rollo assumes responsibility for the business direction, strategic development and product delivery of the company's integrated metrology systems.

"Jason has the ideal background, skill-set and work ethic to lead our integrated metrology sales efforts," said John Heaton, president and CEO of Nanometrics. "His contribution was fundamental to Nanometrics' entrance into integrated metrology, and we believe that his experience in building sales teams and implementing business development strategies within the semiconductor industry will continue to be a great benefit to our integrated metrology efforts."

Mr. Rollo has more than 12 years of experience in the semiconductor capital equipment industry. He has been with Nanometrics since 1996, most recently as director of business development, where he was instrumental in the establishment of Nanometrics' integrated metrology business. Mr. Rollo previously held various strategic account and regional sales roles, including the management of regional sales operations in the Southwestern U.S. Mr. Rollo holds a bachelor of science degree from Santa Clara University.

About Nanometrics:
Nanometrics Incorporated is a leading supplier of integrated and automated metrology equipment used in advanced IC, flat panel display and magnetic head manufacturing. The Company's corporate office is located at 1550 Buckeye Drive, Milpitas, CA 95035, with sales and service offices worldwide. Nanometrics is traded on the NASDAQ National Market under the symbol NANO. Nanometrics' website is http://www.nanometrics.com.

Contact:
Peter Gise
Nanometrics
408.435.9600