Nanometrics and Dainippon Screen Form Supplier Agreement

Nanometrics to Supply Integrated Metrology Units for DNS’
New RF³ Coater/Developer

Nanometrics Inc., a leading supplier of standalone and integrated advanced metrology systems, and Dainippon Screen Manufacturing Company Ltd., (Kyoto, Japan), have recently concluded an agreement whereby Nanometrics will supply Dainippon Screen (DNS) with metrology units for integration into DNS’ newly released RF³ Coater/Developer. The Nanometrics unit, which will be installed in the DNS track in its demonstration lab, will enable in-line film thickness and optical critical dimension (OCD) measurement for advanced deep-UV lithography. DNS plans to offer the Nanometrics unit as an option on the new RF³ track. Nanometrics will work closely with DNS’ field support organization to offer front line customer support for all such products supplied by DNS to its global customers.

DNS has an “open” concept for integrated metrology on the RF³, providing standardized installation locations and interface specifications for all metrology manufacturers. The standard interface allows device manufacturers to deal with metrology companies directly, select the units that best meet their requirements and install them in the RF³.

Kenji Kamei, manager of DNS’ Taga track factory, stated that the decision to work with Nanometrics was based on the company’s excellent performance and market presence.

Integrated film thickness measurement allows closed loop control of the coater module to compensate for multiple factors, which can negatively impact performance. In situ OCD measurement enables Advanced Process Control (APC) systems utilizing “real time” CD measurement to adjust vital parameters such as scanner exposure dose.

About Dainippon Screen: Dainippon Screen Mfg. Co., Ltd was established in 1943 and is a top 10 supplier of semiconductor fabrication equipment. The company specializes in track equipment, wafer cleaning systems, and next generation flash anneal tools. All of the company’s production sites are certified for ISO9001 as well as for ISO14001 Environmental Management System. Dainippon Screen is a public company quoted on the Tokyo stock exchange. Homepage: http://www.screen.co.jp.

About Nanometrics:
Nanometrics Incorporated is a leading supplier of integrated and automated metrology equipment used in advanced IC, flat panel display and magnetic head manufacturing. The Company's corporate office is located at 1550 Buckeye Drive, Milpitas, CA 95035, with sales and service offices worldwide. Nanometrics is traded on the NASDAQ National Market under the symbol NANO. Nanometrics' website is http://www.nanometrics.com.

Contact:
Peter Gise
Nanometrics
408.435.9600