 |
 |
 |
 |
 |
 |
 |
|
|
|
|
|
|
|
Press Releases
|
Milpitas, California. January 28, 2004.
Nanometrics Ships Atlas High-Performance Metrology System Standalone Tool Capable of Housing up to Five Metrology Technologies Nanometrics, Inc. (Nasdaq: NANO), a leading supplier of advanced integrated and standalone metrology equipment for the semiconductor industry, today announced shipment of the Nanometrics Atlas Advanced Metrology System, a complete metrology system that combines multiple metrology technologies to provide a reduced cost of ownership, higher throughput and higher utilization. The Atlas is capable of housing up to five critical metrology technologies at one time, providing unsurpassed flexibility. The Nanometrics Atlas Advanced Metrology System offers high-accuracy, high-precision metrology for wafer characterization with excellent repeatability. The system features improved temperature control and robotics, including a dual-arm robot, high-precision stage and high-speed focus system. The Atlas is fully compatible with Nanometrics’ NanoNet™, the network component of Nanometrics’ N2000 Analysis Platform software, which provides system-to-system matching and seamless recipe transferability. “Nanometrics continues to combine multiple metrology technologies within single systems, a trend that benefits customers by providing them with maximum flexibility and value,” said John Heaton, president and CEO of Nanometrics. “By consolidating as many as five critical metrology technologies in the Nanometrics Atlas, Nanometrics has created a total metrology solution capable of performing a wider range of measurements than any other single metrology system on the market.” The Nanometrics Atlas is available for 200 or 300 mm wafer metrology.
It can be configured with any combination of the following metrology
modules: The Nanometrics Atlas features robust pattern recognition, improved thickness reproducibility and superior SR (135 wafers-per-hour for five-site measurement) and SE (90 wafers-per-hour for five-site measurement) throughput. The Atlas offers a software interface and advanced automation, both of which are compliant with standards adopted by SEMI and other organizations. A number of option packages are available for the Atlas, including
remote diagnostics and health monitoring, DVD system back-up, offline
analysis station for remote data analysis and wafer-less recipe creation
and a chromaticity feature to measure film color properties. About Nanometrics: Contact: |
|