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Milpitas, California. January 22, 2004

Nanometrics and Hitachi High-Technologies Ink Supplier Agreement

Nanometrics advanced metrology systems to be integrated in HHT semiconductor products

Nanometrics, Inc. (Nasdaq: NANO), a leading supplier of standalone and integrated advanced metrology systems, and Hitachi High-Technologies Corporation (HHT), headquartered in Tokyo, have recently entered an agreement whereby Nanometrics will supply HHT with metrology units for integration into various HHT semiconductor products. Nanometrics products will be included among the standard options on various semiconductor products offered by HHT to its global semiconductor customers. Nanometrics will work closely with HHT’s field support organization to offer front line customer support for all such products supplied by HHT.

About HHT:
Hitachi High-Technologies offers a wide range of products and services, including: semiconductor manufacturing equipment, analytical instrumentation, scientific instruments, bio-related products, industrial equipment, information equipment, electronic devices, and electronic and industrial materials.

About Nanometrics:
Nanometrics Incorporated is a leading supplier of integrated and automated metrology equipment used in advanced IC, flat panel display and magnetic head manufacturing. The Company's corporate office is located at 1550 Buckeye Drive, Milpitas, CA 95035, with sales and service offices worldwide. Nanometrics is traded on the NASDAQ National Market under the symbol NANO. Nanometrics' website is http://www.nanometrics.com.

Contact:
Peter Gise
Nanometrics
408.435.9600

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