Nanometrics and Ebara Forge Supplier Agreement

Nanometrics advanced Integrated Metrology to be featured in
Ebara CMP systems

Nanometrics, Inc. (Nasdaq: NANO), a leading supplier of advanced integrated and standalone metrology equipment for the semiconductor industry, and Ebara Corporation, headquartered in Fujisawa, Japan have recently concluded a purchase agreement whereby Nanometrics will supply Ebara with integrated metrology (IM) units for integration into Ebara’s CMP products. Ebara will integrate the Nanometrics IM products into their CMP products as one of the standard options on the CMP systems. Nanometrics will work closely with Ebara’s field support organization to offer front line customer support for all such products supplied by Ebara to its global customers.

About Ebara:
Ebara is a leading supplier of precision machinery to the semiconductor device manufacturing industry. Key products in this sector include chemical mechanical polishing systems, dry vacuum pumps, and other equipment, such as wafer plating systems, that assist the industry in meeting the demands of manufacturing the next generation of semiconductor devices. Ebara is actively engaged in developing and commercializing new energy technologies, including wind power generators, fuel cell cogeneration systems, and photovoltaic power generators.

About Nanometrics:
Nanometrics Incorporated is a leading supplier of integrated and automated metrology equipment used in advanced IC, flat panel display and magnetic head manufacturing. The Company's corporate office is located at 1550 Buckeye Drive, Milpitas, CA 95035, with sales and service offices worldwide. Nanometrics is traded on the NASDAQ National Market under the symbol NANO. Nanometrics' website is http://www.nanometrics.com.

Contact:
Peter Gise
Nanometrics
408.435.9600