Integrated Metrology

Film Analysis

FTIR

Inspection

Mask Metrology

Overlay Metrology

Scatterometry

Contamination & Defect Process Control
> SiPHER

Compound Semiconductor
> Carrier Concentration &    Mobility
> PL Mapping
> X-Ray Diffraction

ソリューション

Nanometrics' process control solutions address the critical metrology information necessary for comprehensive, successful advanced process control strategies. Our diverse product offerings provide a vast breadth of metrology capabilities used across major semiconductor manufacturing process areas, including CMP, CVD and Lithography/Etch.