Bruce C. Rhine, Chairman of the Board
Bruce Rhine joined Nanometrics as Chief Strategy Officer and Director in July 2006, and became Chairman of the Board in March 2007. Prior to Nanometrics, he was co-founder, Chairman and CEO of Accent Optical Technologies. He has over 20 years of product marketing, business development, and senior management experience in the semiconductor capital equipment industry. Previous to Accent, Mr. Rhine additionally founded, or co-founded, two other semiconductor capital equipment companies, was President and COO of Asyst Technologies, and managed a $175M oxide etch business unit at Lam Research. He also serves as a board member of NEXX Systems. Mr. Rhine holds a MBA in Finance and a B.S. degree in Chemical Engineering from Pennsylvania State University, where he graduated with honors.

In addition to his regular responsibilities as a member of the Board of Directors, Mr. Rhine advises and assists executive management in matters related to strategic planning, customer/investor relations and M&A opportunities.

Timothy J. Stultz, President & CEO
Timothy Stultz joined Nanometrics as CEO in August 2007 and brings over 20 years of senior management experience in the semiconductor capital equipment industry. For the four years prior to joining Nanometrics, Dr. Stultz served as President, CEO and director of Imago Scientific Instruments, a supplier of proprietary 3-D atom probe microscopes to the research materials and microelectronics industries. Prior to Imago, Dr. Stultz served as President and CEO for ThauMDx, a leading developer of diagnostic systems and technologies for the analysis of biomolecules, drugs and chemicals. From 1994 to 1999, Dr. Stultz served as a Vice President and General Manager with Veeco Instruments, during which time he led the growth of Veeco’s metrology business. Dr. Stultz also was the founder and CEO of Peak Systems, Inc., a pioneer in the rapid thermal processing segment of the semiconductor capital equipment industry. Dr. Stultz received his B.S., M.S. and Ph.D. in Materials Science and Engineering from Stanford University.

William G. Oldham, Lead Director
William Oldham has served as a director of Nanometrics since June 2000. Dr. Oldham is Professor Emeritus at the University of California, Berkeley, where he has been a faculty member since 1964. His research interests include IC processing, with a particular interest in Lithography. He has served as a consultant to the industry and is currently a member of the board of directors of Cymer, Inc., a supplier of light sources for deep ultraviolet photolithography systems.

Vincent J. Coates, Vice Chairman
Vincent Coates has been Chairman of the Board of Nanometrics since it was founded in 1975. He has been our Secretary since February 1989. He also served as our Chief Executive Officer through April 1998 and President from our founding through May 1996, except for the period of January 1986 through February 1987 when he served exclusively as Chief Executive Officer. Mr. Coates also served as Chairman of the Board of Nanometrics Japan Ltd., one of our subsidiaries, since June 1998. Prior to his employment at Nanometrics, Mr. Coates co-founded Coates and Welter Instrument Corporation, a designer of electron microscopes, which was subsequently acquired by Nanometrics. Mr. Coates also spent over 20 years working in engineering, sales and international operations for the Perkin-Elmer Corporation, a manufacturer of analytical instruments. In 1995, he received an award that recognized his contribution to the industry from Semiconductor and Equipment and Materials International, an industry trade organization.

Howard Bain III
Howard Bain has served as director of Nanometrics since April 2008. Mr. Bain has over 30 years of board-level oversight and financial management experience in the high technology and semiconductor manufacturing industries, with capabilities that extend to all areas of corporate finance, operations, internal controls and procedures for compliance with the Sarbanes-Oxley Act of 2002 and public company financial and accounting reporting. Mr. Bain has served as Chief Financial Officer of several publicly-held technology companies, including Portal Software, Vicinity, Informix and Symantec. He currently serves as a director on the boards of Learning Tree International, PGP Corporation, Turin Networks and eCivis. Mr. Bain holds a B.S. in Business from California Polytechnic University and qualifies as an independent director and an audit committee financial expert under the rules of the Securities and Exchange Commission promulgated under the Sarbanes-Oxley Act of 2002.

J. Thomas Bentley
J. Thomas Bentley has served as a director of Nanometrics since April 2004. Mr. Bentley is a co-founder of Alliant Partners, a leading merger and acquisition firm for emerging and mid-market technology companies. Alliant Partners was acquired by Silicon Valley Bank in 2001, and Mr. Bentley departed in 2005. He is also a director of Rambus (RMBS) and the American Foundation for Suicide Prevention.

Joseph Dox
Joseph Dox has served as a director of Nanometrics since May 2007. Mr. Dox has held numerous senior accounting and finance positions in the electronics field since 1975, He became President and COO of Novellus Systems in 1991 until his retirement in 1994. Mr. Dox has served on various semiconductor equipment boards including Novellus, Electroglas and Accent, among others. He received a B.S. degree in Accounting from Northern Arizona University and an MBA from Santa Clara University.

Stephen Smith
Stephen Smith has served as a director of Nanometrics since April 2004. Dr. Smith has been a professor in the Department of Molecular and Cellular Physiology at the Stanford University School of Medicine since 1989, where he researches brain development and function with special interests in the dynamic and structural aspects of synapse and circuit formation and synaptic plasticity. Dr. Smith is the author of numerous research articles in the fields of cellular and molecular neuroscience.

Edmond R. Ward
Edmond Ward has served as a director of Nanometrics since July 1999. Since January 2002, he has served as Chief Technical Officer of Unity Semiconductor, a semiconductor design and manufacturing company. From 1992 to 1997, Mr. Ward was Vice President of Technology at Silicon Valley Group, Inc., a supplier of wafer processing equipment. From 1999 to 2006, Mr. Ward was General Partner at Virtual Founders, a venture capital firm.